UNIT Instruments / Kinetics / Celerity

UNIT Instruments was a major manufacturer of mass flow controllers for the semiconductor industry, developing the widely used UFC series and later digital MFC technologies. UNIT was acquired in 1999 by Kinetics, which incorporated the company and its mass flow products into its semiconductor fluid-systems business. Kinetics was subsequently reorganized as Celerity, where the UNIT MFC product line continued and new technologies such as pressure-transient-insensitive (PTI) mass flow control were developed. Brooks Instrument acquired Celerity's instrumentation business in 2009, bringing the UNIT and Celerity MFC technology and product heritage into Brooks, where portions of the technology continue today.