Tylan / Millipore / Mykrolis

Tylan was an early pioneer in mass flow control technology and introduced the FC-260, one of the first commercial mass flow controllers used in semiconductor manufacturing. Millipore acquired Tylan General in 1997, incorporating its mass flow and gas-delivery products into Millipore's Microelectronics business. That business was later spun off as Mykrolis in 2001–2002, continuing many of the Tylan and Millipore flow-control product lines. The Mykrolis gas-delivery business, including mass flow controllers, eventually became part of Celerity and was acquired by Brooks Instrument in 2009. As a result, many Tylan, Millipore and Mykrolis MFCs share a common product and technology heritage.