SAM / Hitachi

SAM (Sankyo Advanced Materials) developed mass flow controllers and related gas-flow instrumentation for semiconductor manufacturing, with products commonly encountered under the SAM and Hitachi branding. The business became associated with Hitachi Metals, expanding its presence in semiconductor gas-delivery and mass flow control. Hitachi Metals later strengthened this business by acquiring Aera's mass flow control product line from Advanced Energy in 2010, bringing SAM/Hitachi and Aera mass flow technologies under the same corporate organization.