MKS Instruments

Founded in 1961, MKS Instruments began with the development of the Baratron® capacitance manometer and grew into a major supplier of pressure, vacuum, gas-delivery and mass flow control technology for semiconductor manufacturing and other advanced industries. MKS became widely known for its Mass-Flo® controllers and later expanded its portfolio with digital, thermal and pressure-based mass flow technologies. Today, MKS offers a broad range of MFCs including the G-Series, P-Series and C-Series, along with pressure controllers, valves, vacuum instrumentation and process-control systems. The company changed its corporate name from MKS Instruments, Inc. to MKS Inc. in 2025, while continuing to use the MKS brand for its instrumentation products.