HORIBA / STEC
STEC was a Japanese manufacturer specializing in mass flow controllers and related gas and liquid flow instrumentation, becoming a major supplier to the semiconductor industry. HORIBA acquired STEC in 2005, adding its mass flow control technology to the HORIBA Group's semiconductor instrumentation business. STEC products subsequently became widely marketed under the HORIBA STEC name, with the SEC, Z500 and later digital MFC families becoming common in semiconductor process equipment. Today, HORIBA continues the STEC mass flow controller product line as part of its semiconductor and process-control instrumentation business.
Mass Flow Controllers & Mass Flow Meters
- 4400
- 4400M
- 4500
- 4500M
- 4600
- 7320
- 7330
- 7340
- 7350
- Z-300 Series
- Z511
- Z311
- Z744
- Z734
- Z724
- Z714
- Z713
- Z712
- Z544
- Z534
- Criterion
- Z532
- Z524
- Z522
- Z514
- Z512
- SEC-7350
- Z314
- Z312
- PV-2203MC
- SEC-7440
- SEC-7340
- SEC-7330
- SEC-7320
- SEC-4600M
- SEC-4550M
- SEC-4500M
- SEC-4400M
- SEC-4600R
- SEC-4400R
- SEC-4550R
- SEC-4500R
- SEC-3000
Pressure Controllers
- Z-500 Series
- Z-700 Series
- D-500 Series
- D-200 Series
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