Brooks Instrument

Founded in 1946, Brooks Instrument is one of the longest-established manufacturers of precision flow measurement and control equipment and became a major supplier of thermal mass flow controllers to the semiconductor industry. Emerson acquired Brooks in 1964 and owned the company until 2007, when it was sold to American Industrial Partners. Brooks significantly expanded its MFC technology portfolio in 2009 by acquiring Celerity's instrumentation business, which carried the legacy of both Tylan → Millipore → Mykrolis → Celerity and UNIT Instruments → Kinetics → Celerity mass flow product lines. This brought decades of Tylan, Mykrolis, UNIT and Celerity MFC technology and intellectual property into Brooks. Illinois Tool Works (ITW) acquired Brooks in 2012, and Brooks continues to manufacture mass flow controllers, meters and related flow instrumentation today.