ASM / Qualiflow

ASM / Qualiflow

ASM developed mass flow control technology for use in semiconductor processing equipment, including the AFC-series mass flow controllers. In 1997, ASM spun off its mass flow controller business as Qualiflow, which continued and expanded many of the same product families for semiconductor and high-purity gas applications. Because of this direct lineage, older ASM and Qualiflow MFCs often share closely related designs, model numbers and technology. Qualiflow later operated as an independent specialist in mass flow and gas-control instrumentation.